CHARACTERIZATION OF RF AND DC MAGNETRON REACTIVE SPUTTERED TiO2 THIN FILMS FOR GAS SENSORS
نویسندگان
چکیده
R. YORDANOV, S. BOYADJIEV, V. GEORGIEVA Department of Microelectronics, Technical University of Sofia, 8 Kl. Ohridski Blvd, 1756, Sofia, Bulgaria Budapest University of Technology and Economics, Department of Inorganic and Analytical Chemistry, Technical Analytical Chemistry Research Group of the Hungarian Academy of Sciences, H-1111 Budapest, Műegyetem rakpart 4, Hungary Institute of Solid State Physics, Bulgarian Academy of Sciences, 72 Tzarigradsko Chaussee Blvd, 1784, Sofia, Bulgaria
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تاریخ انتشار 2014